Research output: Contribution to report/book/conference proceedings › In-proceedings paper › peer-review
Original language | English |
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Title of host publication | Proceedings of SPIE - Nano- and Micro-metrology |
Place of Publication | United States |
Pages | 42-49 |
Publication status | Published - Jun 2005 |
Event | 2005 - SPIE : Optical Metrology - SPIE, Munich, Germany Duration: 13 Jun 2005 → 17 Jun 2005 |
Conference | 2005 - SPIE |
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Country/Territory | Germany |
City | Munich |
Period | 2005-06-13 → 2005-06-17 |
ID: 293079