Research output: Contribution to journal › Article
Microdose and Breakdown Effects Induced by Heavy Ions on sub 32-nm Triple-Gate SOI FETs. / Griffoni, Alessio; Gerardin, Simone; Meneghesso, Gaudenzio; Paccagnella, Alessandro; Simoen, Eddy; Put, Sofie; Claeys, Cor; Schyns, Marc (Peer reviewer).
In: IEEE transactions on nuclear Science, Vol. 55, No. 6, 07.2008, p. 3182-3188.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Microdose and Breakdown Effects Induced by Heavy Ions on sub 32-nm Triple-Gate SOI FETs
AU - Griffoni, Alessio
AU - Gerardin, Simone
AU - Meneghesso, Gaudenzio
AU - Paccagnella, Alessandro
AU - Simoen, Eddy
AU - Put, Sofie
AU - Claeys, Cor
A2 - Schyns, Marc
N1 - Score = 10
PY - 2008/7
Y1 - 2008/7
N2 - We studied the permanent effects of heavy-ion strikes on decananometer triple-gate SOI devices.We highlighted the role of the geometry and the three-dimensional architecture in the response to heavy ions. Heavy-ion strikes in state-of-the-art Triple- Gate FETs may have measurable permanent effects, due to microdose in the buried oxide, breakdown of the gate oxide, or interface state generation in the side oxide/body interface. This last effect is particularly interesting since it is related to the verticality of multigate transistors.
AB - We studied the permanent effects of heavy-ion strikes on decananometer triple-gate SOI devices.We highlighted the role of the geometry and the three-dimensional architecture in the response to heavy ions. Heavy-ion strikes in state-of-the-art Triple- Gate FETs may have measurable permanent effects, due to microdose in the buried oxide, breakdown of the gate oxide, or interface state generation in the side oxide/body interface. This last effect is particularly interesting since it is related to the verticality of multigate transistors.
KW - Breakdown
KW - heavy ions
KW - microdose
KW - multigate device
UR - http://ecm.sckcen.be/OTCS/llisapi.dll/open/ezp_97139
UR - http://knowledgecentre.sckcen.be/so2/bibref/5788
U2 - 10.1109/TNS.2008.2007234
DO - 10.1109/TNS.2008.2007234
M3 - Article
VL - 55
SP - 3182
EP - 3188
JO - IEEE transactions on nuclear Science
JF - IEEE transactions on nuclear Science
SN - 0018-9499
IS - 6
ER -
ID: 67437