Reliability studies of micro-optical components in NEMO

Research output: Contribution to report/book/conference proceedings › In-proceedings paper › peer-review

Authors

Francis Berghmans
Marco Van Uffelen
S. Eve
E. Ernst
A. Last
D. Rabus
N. Huber
O. Kraft
A. Andrei
L. Nieradko
K. Krupa
M. Jozwik
C. Gorecki
L. Hirsinger
P. Delobelle
P. Kniazewski
L. Salbut
M. Kujawinska

Documents & links

Abstract

We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.

Details

Original language	English
Title of host publication	Proceedings of SPIE on CD-rom: Photonics Europe 2006
Place of Publication	Beelingham, Washington, United States
Pages	1-11
Volume	6193
Publication status	Published - Apr 2006
Event	Potonics Europe - SPIE Europe, Strasbourg, France Duration: 3 Apr 2006 → 7 Apr 2006

Conference

Conference	Potonics Europe
Country/Territory	France
City	Strasbourg
Period	2006-04-03 → 2006-04-07

Keywords

micro-optic, reliability, fatigue, metal film, polymer, MEMS, interferometer, refractive index, optical fibre, radiation

ID: 362485