Total Ionizing Dose Effects on a Radiation-Hardened CMOS Image Sensor Demonstrator for ITER Remote Handling

Research output: Contribution to journalArticle

Authors

  • Vincent Goiffon
  • Serena Rizzolo
  • Franck Corbière
  • Sébastien Rolando
  • Saïd Bounasser
  • Marius Sergent
  • Aziouz Chabane
  • Olivier Marcelot
  • Magali Estribeau
  • Pierre Magnan
  • Philippe Paillet
  • Sylvain Girard
  • Marc Gaillardin
  • Timothé Allanche
  • Marco Van Uffelen
  • Laura Mont Casellas
  • Robin Scott
  • Wouter De Cock

Institutes & Expert groups

  • ISAE-ENSMA - École nationale supérieure de mécanique et d'aérotechnique
  • CEA Saclay - Commissariat à l'énergie atomique
  • Université de Saint-Etienne - Laboratoire Hubert Curien
  • Fusion for Energy
  • OVEOLIA - Oxford Technologies Ltd. (OTL)

Documents & links

DOI

Abstract

Total ionizing dose effects are studied on a radiation hardened by design (RHBD) $256\times 256$ -pixel CMOS image sensor (CIS) demonstrator developed for ITER remote handling by using X- and $\gamma $ -ray irradiations. The (color) imaging capabilities of the RHBD CIS are demonstrated up to 10 MGy (SiO2), 1 Grad (SiO2), validating the radiation hardness of most of the designed integrated circuit. No significant sensitivity (i.e., responsivity and color filter transmittance) or readout noise degradation is observed. The proposed readout chain architecture allows achieving a maximum output voltage swing larger than 1 V at 10 MGy (SiO2). The influence of several pixel layout (the gate oxide thickness, the gate overlap distance, and the use of an in-pixel P+ ring) and manufacturing process parameters (photodiode doping profile and process variation) on the radiation-induced dark current increase is studied. The nature of the dark current draining mechanism used to cancel most of the radiation-induced degradation is also discussed and clarified

Details

Original languageEnglish
Pages (from-to)101-110
Number of pages9
JournalIEEE transactions on nuclear Science
Volume65
Issue number1
DOIs
Publication statusPublished - 3 Jan 2018

Keywords

  • Active pixel sensors (APS), CMOS, CMOS immage sensors (CISs), Co60, dark current, deep submicrometer (DMS) process, enclosed layout transistors (ELTs), gamma-ray, Gigarad, image sensors, integrated circuit, ionizing radiation, ITER, MAPS, Megagray, STI, TID

ID: 5417046